Title:
MINUTE ZONE ANALYSING APPARATUS USING XXRAY SONDE
Document Type and Number:
Japanese Patent JPS5445195
Kind Code:
A
Abstract:
In apparatus for examining the material of a specimen with local resolution employing an X-ray probe and operating according to the scanning principle, including a source of X-ray radiation, an optical system for directing X-ray radiation from the source onto the specimen, and a detector disposed for detecting radiation appearing behind the specimen, the source is constituted by a target in which the X-ray radiation is generated, and the optical system acts to focus the X-ray radiation emanating from the target onto the specimen in the form of an X-ray probe.
Inventors:
BENNO ROITAA
Application Number:
JP8283278A
Publication Date:
April 10, 1979
Filing Date:
July 07, 1978
Export Citation:
Assignee:
STRAHLEN UMWELTFORSCH GMBH
International Classes:
G01N23/22; G01N23/223; (IPC1-7): G01N23/06; G01N23/223
Domestic Patent References:
| JPS5234689A | 1977-03-16 | |||
| JP50137972B |