MIXING GAS SUPPLYING DEVICE

Japanese Patent JP3387777

B2

PROBLEM TO BE SOLVED: To adequately prevent gas from flowing reversely, by constituting a mixing gas supplying device with a manifold which mixes gas and supplies it to a gas using object, and a flow velocity adjuster which equalizes ratio of path cross section of a gas supplying line to flowing gas flow.
SOLUTION: Gas G1 with minimum flow is supplied to a gas supplying line 21 far away from a gas out part 11 of a manifold 3, flow of gas G2 larger than that of the gas G1 is supplied to a gas supplying line 22 adjacent to the gas supplying line 21, flow of gas G3 larger than that of the gas G2 is supplied to a gas supplying line 23 adjacent to the gas supplying line 22 and, gas Gn with maximum flow is supplied to a gas supplying line 2n nearest the gas out part 11 of the manifold 3. Flow passage inner diameters of gas supplying lines 21-2n are equal, and flow velocities of gas flowing through gas supplying lines 21-2n are different. Each flow velocity adjuster 41-4n on each gas supplying line 21-2n equalizes ratio of path cross section of each gas supplying line to flowing gas flow of each gas supplying line 21-2n.

Yukio Minami
Shinichi Ikeda
Manoharu, L, Shrestha
Akira Kagazume

JP15333697A

March 17, 2003

June 11, 1997

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株式会社フジキン
東京エレクトロン株式会社

F15D1/02; B01J4/00; F17D1/02; G05D7/06; G05D11/13; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): F17D1/02; B01J4/00; F15D1/02; G05D7/06; G05D11/13; H01L21/205; H01L21/3065

JP568866A
JP628040A
JP5315290A
JP7306720A
JP4167107A
JP8197257A
JP6319972A
JP605222A
JP5172265A
JP6241400A
JP4817432U
JP528525B1
JP6136453B1
JP5620Y2

Takeo Sugimoto

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