Title:
移動体装置、露光装置及び露光方法、並びにデバイス製造方法
Document Type and Number:
Japanese Patent JPWO2007142351
Kind Code:
A
Inventors:
Toru Imai
Akihiro Watanabe
Susumu Makinouchi
Akihiro Watanabe
Susumu Makinouchi
Application Number:
JP2007061714W
Publication Date:
December 13, 2007
Filing Date:
June 11, 2007
Export Citation:
Assignee:
NIKON CORP.
Sendai NIKON
Sendai NIKON
International Classes:
G01B11/00; H01L21/027
Attorney, Agent or Firm:
Tokuji Tateishi
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