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Title:
MODIFYING METHOD AND MODIFYING APPARATUS
Document Type and Number:
Japanese Patent JP2011041947
Kind Code:
A
Abstract:

To provide a modifying method and a modifying apparatus which has high processing efficiency and is simple and low in cost.

The modifying apparatus is equipped with a surface radiation type electron source 1 made of a cold electron emission element, which radiates the electron rays emitted from this surface radiation type electron source 1 to an object, so as to modify the properties or the surface of the object. Since the surface radiation type electron source 1 made of the cold electron emission element is employed, the electric power consumption is reduced and the rise time to the electron emission can be reduced compared to a thermoelectron emission element. The modifying method and the modifying apparatus which has high processing efficiency and is simple and low in cost can be realized, unlike the conventional methods and conventional devices employing an electron source made of a point or linear thermoelectron emission element.


Inventors:
ICHIHARA TSUTOMU
AIZAWA KOICHI
KOMODA TAKUYA
IKEDA JUNJI
Application Number:
JP2010212149A
Publication Date:
March 03, 2011
Filing Date:
September 22, 2010
Export Citation:
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Assignee:
PANASONIC ELEC WORKS CO LTD
International Classes:
B01J19/12; A61L2/10; H01J1/312
Domestic Patent References:
JP2000100316A2000-04-07
JPH1152100A1999-02-26
JP2000304900A2000-11-02
JPH04244213A1992-09-01
JPS61157676A1986-07-17
Attorney, Agent or Firm:
Keisei Nishikawa
Mizuhiji Katsuhisa
Takeshi Sakaguchi
Hidetoshi Kitade



 
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