モジュラーマイクロ波プラズマ源 - APPLIED MATERIALS,INCORPORATED

Title:

モジュラーマイクロ波プラズマ源

Document Type and Number:

Japanese Patent JP7045365

Kind Code:

B2

Abstract:

Embodiments include a modular microwave source. In an embodiment, the modular microwave source comprises a voltage control circuit, a voltage controlled oscillator, where an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator. The modular microwave source may also include a solid state microwave amplification module coupled to the voltage controlled oscillator. In an embodiment, the solid state microwave amplification module amplifies an output from the voltage controlled oscillator. The modular microwave source may also include an applicator coupled to the solid state microwave amplification module, where the applicator is a dielectric resonator.

Inventors:

Klaus, Philip Allen
Choa, Thai Chung

Application Number:

JP2019508867A

Publication Date:

March 31, 2022

Filing Date:

January 18, 2017

Export Citation:

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Assignee:

APPLIED MATERIALS,INCORPORATED

International Classes:

H05H1/46

Domestic Patent References:

JP2006156100A
JP2011014542A

Foreign References:

WO2014184544A1
US20140197761

Attorney, Agent or Firm:

Sonoda/Kobayashi Patent Business Corporation

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