Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MOLECULAR BEAM EPITAXIAL GROWTH METHOD AND CRUCIBLE TO BE USED THEREFOR
Document Type and Number:
Japanese Patent JPH06172083
Kind Code:
A
Abstract:

PURPOSE: To suppress the creeping of raw material along a crucible wall and shorten the time from the filling of raw material to the growth of a crystal in a molecular beam epitaxial growth method by using a crucible made of pyrolytic boron nitride (pBN) and having mirror-polished inner surface near the opening part.

CONSTITUTION: The inner surface of a crucible part 1b near the opening of a crucible 1 made of pBN is mirror polished. A raw material element 2 (e.g. Al) is filled into the crucible and maintained at or above the melting point in high vacuum. Since the inner surface of the opening part 1b is mirror- polished, the creeping of Al can completely be prevented. An Al-containing semiconductor layer such as AlGaAs or InAlAs is grown on a substrate.


Inventors:
OZAKI TSUTOMU
AKAMATSU KAZUHIRO
Application Number:
JP34514392A
Publication Date:
June 21, 1994
Filing Date:
December 02, 1992
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
JAPAN ENERGY CORP
International Classes:
C23C14/24; C30B23/08; (IPC1-7): C30B23/08; C23C14/24
Attorney, Agent or Firm:
Hiroshi Namikawa