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Patent Searching and Data


Title:
MOLECULAR BEAM SOURCE CELL
Document Type and Number:
Japanese Patent JP2012004291
Kind Code:
A
Abstract:

To provide a molecular beam source cell for Al that can maintain a uniform spatial intensity distribution without breaking the molecular beam source cell.

The molecular beam source cell 1 includes a crucible 10 which houses a raw material to be vaporized, and a molecular beam source heater portion 12 which surrounds a side face of the crucible 10 to heat the crucible 10. The crucible 10 includes a bottomed cylindrical container provided with an annular opening 16 at an upper end, and a flange 11 which is arranged outwardly over the entire periphery of the opening 16 of the container, and protrudes to outside the molecular beam source heater portion 12.


Inventors:
FUJII TOSHIO
SUZUKI RYO
Application Number:
JP2010137101A
Publication Date:
January 05, 2012
Filing Date:
June 16, 2010
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/203; C23C14/24; C30B23/08
Attorney, Agent or Firm:
Junichi Yokoyama