Title:
監視システム
Document Type and Number:
Japanese Patent JP7365200
Kind Code:
B2
Abstract:
A monitoring system for a sealing apparatus, the sealing apparatus configured to seal a substrate treatment apparatus by a housing and fill a space sealed by the housing with a predetermined gas atmosphere, the monitoring system includes: a laser sensor for a region, which a person can enter in a space between the housing and the substrate treatment apparatus, as a detection region; and a controller configured to output a control signal to the substrate treatment apparatus or the sealing apparatus based on a detection result by the laser sensor or output a notification signal based on the detection result.
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Inventors:
Shota Kaneko
Shigemi Ohno
Norihide Sagara
Shigemi Ohno
Norihide Sagara
Application Number:
JP2019202929A
Publication Date:
October 19, 2023
Filing Date:
November 08, 2019
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/02; G08B23/00
Domestic Patent References:
| JP2019140379A | ||||
| JP2002064300A | ||||
| JP2001326162A | ||||
| JP2003272847A | ||||
| JP10050800A | ||||
| JP10208170A |
Foreign References:
| US20190252223 | ||||
| US20020006675 |
Attorney, Agent or Firm:
Tetsuo Kanemoto
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine