Title:
単分子層堆積方法および装置
Document Type and Number:
Japanese Patent JP5337376
Kind Code:
B2
Abstract:
An adaptive real time thermal processing system is presented that includes a multivariable controller. The method includes creating a dynamic model of the MLD processing system and incorporating virtual sensors in the dynamic model. The method includes using process recipes comprising intelligent set points, dynamic models, and/or virtual sensors.
Inventors:
Corsal, sanjeev
Panday, Pradeep
Kenji Sugishima
Panday, Pradeep
Kenji Sugishima
Application Number:
JP2007552141A
Publication Date:
November 06, 2013
Filing Date:
December 21, 2005
Export Citation:
Assignee:
東京エレクトロン株式会社
ト-キョ-・エレクトロン・アメリカ・インコーポレーテッド
ト-キョ-・エレクトロン・アメリカ・インコーポレーテッド
International Classes:
H01L21/316; C23C16/52; H01L21/31
Domestic Patent References:
| JP2004281824A | ||||
| JP2004247332A | ||||
| JP661323A | ||||
| JP2001505256A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki