PURPOSE: To reduce the structure of a monolithic photoelectronic integrated circuit itself and to facilitate the incorporation of it into other decices by a method wherein a light-emitting element and an electronic integrated circuit are monolithically integrated.
CONSTITUTION: A photo-electronic integrated circuit has an electronic integrated circuit 22 and light-receiving element 24 separating each other on a p-Si substrate 20 and the surface region within this Si substrate 20 and further a plane- light-emitting type semiconductor laser 26 as a light-emitting element on the upper side of the light-receiving element 24. The light-receiving element 24 is electrically connected to an electronic integrated circuit 22 through, for example, a wiring conductor. With such construction where a light-emitting element, a light-receiving element, and required electronic integrated circuits are formed within one chip, the structure of circuitry can be made smaller in reduced manufacturing processes, without requiring assembling work of separately manufactured light-emitting elements, light-receiving elements and electronic circuits.
KAMIJO TAKESHI
HASHIMOTO AKIHIRO
KAWAHARA MASATO
