To enhance product quality of a motion sensor.

This motion sensor with an oscillator 22 supported displaceably by an elastic beam 21, formed between a lower substrate having the first electrode part and an upper substrate having the second electrode part, using an intermediate substrate 20 of three-layered structure comprising the first conductive layer 25, an insulating layer 26 and the second first conductive layer 27, and for detecting a displacement of the oscillator 22 by the first electrode part and the second electrode part to detect an angular velocity or an acceleration. The motion sensor is provided with a support part 23 formed of the first conductive layer 25, an insulating layer 26 and the second conductive layer 27, and for supporting the beam part 21, and conduction parts 24a-24e formed of the first conductive layer 25, the insulating layer 26 and the second conductive layer 27, insulated electrically from the support part 23, and for extracting the first electrode part 11 to the upper substrate, and the conduction parts 24a-24e are supported by the second conductive layer extended from the support part 23.

COPYRIGHT: (C)2008,JPO&INPIT