Title:
静圧シール付きモーター
Document Type and Number:
Japanese Patent JP6370995
Kind Code:
B2
Abstract:
A static pressure seal-equipped motor in which front and rear gaps are sealed by first and second static pressure seal portions disposed at first and second axial end portions of a motor rotating shaft protruding toward front and rear. Sealing gas supplied to sealing gaps of the first and second static pressure seal portions is caused to diverge and flow to chemical liquid atmospheres and a motor chamber or an encoder chamber into the chemical liquid atmospheres, and also prevent entry of chemical liquid-containing gas from the chemical liquid atmospheres into the motor chamber or encoder chamber.
Inventors:
Maruyama Riki
Kazuma Furuta
Kazuma Furuta
Application Number:
JP2017512181A
Publication Date:
August 08, 2018
Filing Date:
April 17, 2015
Export Citation:
Assignee:
Harmonic Drive Systems Inc.
International Classes:
F16C33/76; H02K5/10; F16J15/40; H02K5/173; H02K11/21
Domestic Patent References:
| JP2001200844A | ||||
| JP2002057135A | ||||
| JP4314625B2 | ||||
| JP11265868A | ||||
| JP2002184738A |
Attorney, Agent or Firm:
Shiro Yokozawa