Title:
Mount flange removing jig
Document Type and Number:
Japanese Patent JP6004885
Kind Code:
B2
Inventors:
Okumei Kengo
Application Number:
JP2012229049A
Publication Date:
October 12, 2016
Filing Date:
October 16, 2012
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B25B27/073; B23B31/02; B24B45/00; H01L21/301
Domestic Patent References:
| JP2009262266A | ||||
| JP2010284774A | ||||
| JP6000672U | ||||
| JP58070884U | ||||
| JP7040007U |
Attorney, Agent or Firm:
Akira Matsumoto
Hiroshi Oue
Hiroshi Oue