Title:
工具マウントに切削工具を装着する装着方法及びこれに使用される装着治具
Document Type and Number:
Japanese Patent JP5350872
Kind Code:
B2
Inventors:
Narutoshi Ozawa
Application Number:
JP2009105313A
Publication Date:
November 27, 2013
Filing Date:
April 23, 2009
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; H01L21/301
Domestic Patent References:
| JP6262515A | ||||
| JP2007015095A | ||||
| JP5076958A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki