Title:
載置台及び熱処理装置
Document Type and Number:
Japanese Patent JP4380236
Kind Code:
B2
Abstract:
A heating means is disclosed which comprises a reflector plate composed of an opaque quartz and a quartz tube welded to the surface of the reflector plate. A carbon wire which generates heat when a current is applied is inserted in the quartz tube.
Inventors:
Junichi Arami
Application Number:
JP2003178690A
Publication Date:
December 09, 2009
Filing Date:
June 23, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/324; H05B3/84; C23C16/46; F27B5/04; F27B5/14; F27B17/00; H01L21/00; H01L21/02; H01L21/22; H01L21/31; H05B3/14
Domestic Patent References:
| JP2000021890A | ||||
| JP2001208478A | ||||
| JP5021438U | ||||
| JP2001332373A | ||||
| JP63216283A | ||||
| JP7022500A |
Attorney, Agent or Firm:
Akihiro Asai