Title:
可動構造体及びそれを用いたマイクロミラー素子
Document Type and Number:
Japanese Patent JP4980990
Kind Code:
B2
Abstract:
In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units 3 of ladder shape with honeycombed portions 3c are formed by twin supporting rods 3a and crosspieces 3b bridged between the twin supporting rods 3a so as to support the moving plate 2 rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units 3 by the honeycombed portions 3c of the hinge units 3.
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Inventors:
Ueda Hideki
Hiroshi Noge
Kiyohiko Kono
Hiroaki Tachibana
Hiroshi Noge
Kiyohiko Kono
Hiroaki Tachibana
Application Number:
JP2008166581A
Publication Date:
July 18, 2012
Filing Date:
June 25, 2008
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H02N1/00; B81B3/00; G02B26/08; G02B26/10; G06V30/224; H04N1/113
Domestic Patent References:
| JP200315064A | ||||
| JP2005326463A | ||||
| JP2005308863A | ||||
| JP2007256554A | ||||
| JP2002321196A | ||||
| JP2003131161A | ||||
| JP2005189825A |
Attorney, Agent or Firm:
Yasuo Itaya
Katsumi Taguchi
Shinichi Mizuta
Katsumi Taguchi
Shinichi Mizuta