To reduce the size of a multi-axes force sensor.
An X beam 3 and a Y beam 4 are provided orthogonally to the opposite inner faces of a square frame 2 and beams 6a-6d are provided integrally at the supporting part of the X, Y beams 3, 4 while being split by a slit 5 and orthogonally to the end extending toward the frame of each beam. The X, Y beams 3, 4 are split to the left and right by the slot to provide respective pairs of parallel split beams 3a-3d, 4a, 4d and strain gauges are pasted to the orthogonal and parallel split beams. Since the orthogonal beams are formed with substantially same length as the X, Y beams 3, 4, the X, Y beams 3, 4 are flexible significantly in the axial direction thereof. Consequently, the output gain of axial force detectable through the strain gauge pasted to the orthogonal beam can be increased and since the strain gauge can be pasted to the each split face of each parallel split beam, the number of the strain gauges being pasted to the each face can be set at 1 or less resulting in the reduction of size of a multi-axes force sensor.
KASAI SHU
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