Title:
多室型熱処理装置
Document Type and Number:
Japanese Patent JP6596703
Kind Code:
B2
Abstract:
A multi-chamber heat treatment device according to the present disclosure in which heating chambers are disposed with an intermediate transport chamber interposed therebetween in a top view, and a treatment object is stored in a heating chamber via the intermediate transport chamber, wherein the multi-chamber heat treatment device includes a gas cooling chamber which cools the treatment object using a cooling gas; and a cooling gas circulation device which includes an gas inlet and a gas outlet.
Inventors:
Kazuhiko Katsumata
Kaoru Isomoto
Nakayama
Kaoru Isomoto
Nakayama
Application Number:
JP2015042635A
Publication Date:
October 30, 2019
Filing Date:
March 04, 2015
Export Citation:
Assignee:
Ihi Co., Ltd.
Ihi Mechanical Systems Co., Ltd.
Ihi Mechanical Systems Co., Ltd.
International Classes:
C21D1/62; C21D1/00; F27B9/02; F27B9/12; F27D9/00
Domestic Patent References:
| JP2003183728A | ||||
| JP5005171A | ||||
| JP11153386A | ||||
| JP2005029872A | ||||
| JP2004084997A | ||||
| JP2008081781A |
Attorney, Agent or Firm:
Nishizawa Kazumi
Mitsuo Teramoto
Yuichiro Shimizu
Hisanori Takahashi
Mitsuo Teramoto
Yuichiro Shimizu
Hisanori Takahashi