Title:
マルチ荷電粒子ビーム描画装置及びマルチ荷電粒子ビーム描画方法
Document Type and Number:
Japanese Patent JP7002837
Kind Code:
B2
Abstract:
A multi charged particle beam writing apparatus includes an irradiation time calculation circuit to calculate an irradiation time of a beam to each pixel, for each of a plurality of pixels which are obtained by dividing a writing region of a target object and each of which serves as an irradiation unit region per beam of multi charged particle beams, a gray-scale value calculation circuit to calculate, for each pixel, a gray-scale value of gradation by gray scale levels by dividing the irradiation time by a quantization unit, and a gray-scale value correction circuit to correct, for each of a plurality of groups each composed of adjacent pixels, dose errors each caused by gradation, by gray scale levels, of the irradiation time which occur in the adjacent pixels in a group concerned, by increasing or decreasing the gray-scale value of at least one pixel in the group concerned by 1.
Inventors:
Hiroshi Matsumoto
Application Number:
JP2016209987A
Publication Date:
January 20, 2022
Filing Date:
October 26, 2016
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; G03F7/20; H01J37/305
Domestic Patent References:
| JP2015207608A | ||||
| JP2002015975A | ||||
| JP2016134555A | ||||
| JP2015029045A | ||||
| JP2004040076A | ||||
| JP2012527764A | ||||
| JP2015211175A |
Attorney, Agent or Firm:
Torushin Ikegami
Akira Sudo
Yoshiyuki Matsuyama
Akira Sudo
Yoshiyuki Matsuyama