Title:
MULTI-POINT SURFACE TEMPERATURE MEASUREMENT SYSTEM AND METHOD THEREOF
Document Type and Number:
Japanese Patent JP2023063218
Kind Code:
A
Abstract:
To provide a fiber optic temperature measurement system for measuring surface temperature at multiple points simultaneously in real time.SOLUTION: A fiber optic temperature measurement system disclosed herein comprises: a fiber optic probe having a distal end and a proximal end and comprising a fiber bundle consisting of multiple individual fibers, each having a thermographic phosphor at a tip thereof; and a high-speed camera. The invention enables accurate multi-point measurement of ESC surface temperature. The thermographic phosphor is embedded in a nudge at a tip, or on a surface (under the surface) at a predetermined position, of each fiber.SELECTED DRAWING: Figure 3
Inventors:
ONDREJ MECL
NOAH JOHN JOE JOHNSON
NOAH JOHN JOE JOHNSON
Application Number:
JP2022104372A
Publication Date:
May 09, 2023
Filing Date:
June 29, 2022
Export Citation:
Assignee:
ACCELOVANT TECH CORP
International Classes:
G01K11/20
Attorney, Agent or Firm:
Hayashi Kazuyoshi
Tetsuo Shiba
Takuya Saito
Mitsuru Iwaike
Kazuhiro Kosuga
Tetsuo Shiba
Takuya Saito
Mitsuru Iwaike
Kazuhiro Kosuga
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