Title:
MULTILAYER FILM MIRROR AND SOFT X-RAY OPTICAL SYSTEM HAVING THE MULTILAYER FILM MIRROR
Document Type and Number:
Japanese Patent JP2006308485
Kind Code:
A
Abstract:
To provide a multilayer film mirror capable of obtaining high reflectivity with the constituting materials of the multilayer film with a combination of the same materials and improving durability, and a soft X-ray optical system having the multilayer film mirror.
For the multilayer film mirror 2 which repeatedly piling layers (Mo layers 3 and Si layers 4) consisting of different materials with large difference in refractive index in soft X-ray range and refractive index in vacuum, the material of at least either layer of different materials is constituted of a material with a lighter mass of a natural isotope.
Inventors:
IMAI TAKAKO
ANDO KENJI
KANAZAWA HIDEHIRO
TERANISHI KOJI
MIURA TAKAYUKI
TAKADA KAZUE
ANDO KENJI
KANAZAWA HIDEHIRO
TERANISHI KOJI
MIURA TAKAYUKI
TAKADA KAZUE
Application Number:
JP2005133110A
Publication Date:
November 09, 2006
Filing Date:
April 28, 2005
Export Citation:
Assignee:
CANON KK
International Classes:
G21K1/06; G02B5/08; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Tatsuya Nagao