Title:
複数入射角分光散乱計システム
Document Type and Number:
Japanese Patent JP4879187
Kind Code:
B2
Abstract:
Techniques for optimizing the sensitivity of spectroscopic measurement techniques with respect to certain profile variables by selecting desired measurement angles since the measurement sensitivity to each variable depends, at least in part, on the measurement angles of an incident beam. The selected desired set of measurement angles includes both an azimuth angle and a polar angle. Optimizing the sensitivity of spectroscopic measurement techniques can also reduce or eliminates measurement correlation among variable to be measured.
Inventors:
Barrett Noah
One Haimin
One Haimin
Application Number:
JP2007545555A
Publication Date:
February 22, 2012
Filing Date:
December 06, 2005
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
G01N21/956; G01N21/47
Domestic Patent References:
| JPH0227305A | 1990-01-30 | |||
| JP2002162367A | 2002-06-07 |
Attorney, Agent or Firm:
Meisei International Patent Office