To reduce the cost of a multipole lens by positioning the poles on symmetrical points with precision.

The multipole lens comprises an optical axis B of a charged particle beam which is established along a Z-axis orthogonal to an X-axis and a Y-axis intersecting at right angles with each other, plural pairs of poles 16 which are placed in a symmetrical and radial manner with respective to the optical axis B in an XY-plane orthogonal to the Z-axis, where the poles 16 generate an electric field or a magnetic field directed from one to the other of a pair of the poles 16 placed in the symmetrical manner with respective to the optical axis B; and a pole fixing member 15 for fixing/holding poles 16, where the poles are formed by uncut off portions being cut off with a pole forming member fixed/held by the pole fixing member 15, and the pole forming member has pole splitting grooves which extend from the center of a cylindrical single-piece member into the radial direction and are formed with partially uncut off portions left in the cylindrical single-piece member.