Title:
MULTIWINDOW ELECTRON GUN
Document Type and Number:
Japanese Patent JP2004239920
Kind Code:
A
Abstract:
To provide a method for generating free electrons in an electron beam device 12 to simply restore holes developed in electron windows 27.
This method comprises steps for: evacuating gases from a gas-permeable envelope 15; generating a plurality of electrons and accelerating the electrons toward the windows 27; monitoring the windows 27 with respect to defects; and deflecting the electrons so as to keep them from hitting against a defective window 27.
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Inventors:
WAKALOPULOS GEORGE
Application Number:
JP2004152086A
Publication Date:
August 26, 2004
Filing Date:
May 21, 2004
Export Citation:
Assignee:
USHIO INTERNATL TECHNOLOGIES I
International Classes:
G21K5/04; G21K1/093; G21K5/00; H01J33/04; (IPC1-7): G21K5/04; G21K1/093; G21K5/00
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yutaka Horii
Toshio Morita
Yutaka Horii