Title:
N-VINYLLACTAM DERIVATIVE, ITS POLYMER AND PHOTORESIST CONTAINING THE SAME POLYMER
Document Type and Number:
Japanese Patent JP2929526
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain an N-vinyllactam derivative useful as a material for a photoresist suitable for exposure to far ultraviolet rays used for a microlithography, having a high glass transition temperature and capable of forming a high sensitive and resolution image.
SOLUTION: This N-vinyllactam derivative is represented by formula I [R1 is H, a 1-10C alkyl, etc.; R2 is a group represented by the formula OR6, etc.; R3 is H, a 1-10C alkyl, etc.; R4 and R5 are each hydroxyl, a group represented by the formula OR7, etc.; R6 is a 1-10C alkyl, etc.; R7 is a 6-12C aryl, etc.; (m) is an integer of 0-10], e.g. 3-(t-butoxycarbonyl)-1-vinyl-2-pyrrolidionone. An N- vinyllactam deriovative homopolymer represented by formula II [(n) is an integer of 10-10000], a copolymer of two or more of the derivatives, a copolymer represented by formula III [R8 is a 6-20C aryl; (k) is a molar fraction of 0.5-0.95; (1) is a molar fraction of 0.05-0.5] composed of the derivative and a styrene derivative and a copolymer represented by formula IV (R9 is a group represented by the formula COOR10; R10 is a 6-12C aryl, etc.) composed of the derivative represented by formula I and a vinyl acrylate-based derivative are obtained from the derivative represented by formula I.
Inventors:
KIN CHINHAKU
TEI MINKO
CHO KYOKO
TEI MINKO
CHO KYOKO
Application Number:
JP24508996A
Publication Date:
August 03, 1999
Filing Date:
September 17, 1996
Export Citation:
Assignee:
GENDAI DENSHI SANGYO KK
KANKOKU KAGAKU GIJUTSUIN
KANKOKU KAGAKU GIJUTSUIN
International Classes:
C07D205/08; C07D207/26; C07D207/273; C07D207/277; C07D211/74; C07D223/10; C07D405/12; C07F7/10; C07F9/553; C08F26/00; C08F26/06; G03F7/039; C08F26/10; G03F7/004; G03F7/038; (IPC1-7): C07D207/277; C07D205/08; C07D207/273; C07D211/74; C07D223/10; C07D405/12; C07F7/10; C07F9/553; C08F26/06; C08F26/10; G03F7/039
Domestic Patent References:
| JP5945439A | ||||
| JP58174944A | ||||
| JP6118630A | ||||
| JP4363309A |
Attorney, Agent or Firm:
Hiroshi Arafune (2 outside)
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