Title:
【発明の名称】クリーンルーム
Document Type and Number:
Japanese Patent JP2570386
Kind Code:
B2
Inventors:
Keiji Ota
Application Number:
JP14271988A
Publication Date:
January 08, 1997
Filing Date:
June 09, 1988
Export Citation:
Assignee:
Hitachi Plant Construction Co., Ltd.
International Classes:
F24F7/06; (IPC1-7): F24F7/06