Title:
【発明の名称】揮発性マグネシウム・アルキルアルミニウムアルコキシドおよびそれを用いたアルミン酸マグネシウム膜の被着
Document Type and Number:
Japanese Patent JP3004734
Kind Code:
B2
Abstract:
PCT No. PCT/KR97/00025 Sec. 371 Date Aug. 11, 1998 Sec. 102(e) Date Aug. 11, 1998 PCT Filed Feb. 12, 1997 PCT Pub. No. WO97/29112 PCT Pub. Date Aug. 14, 1997Novel magnesium dialkylaluminum alkoxide derivative represented by Mg[( mu -OR')2AlR2]2 wherein R and R' are each a C1-5 alkyl group and R is not the same as R', preferably magnesium dimethylaluminum isopropoxide, is easily prepared by reacting a trialkylaluminum with an alcohol or an aluminum trialkoxide to obtain a dialkylaluminum alkoxide; reacting the dialkylaluminium alkoxide with an alkali metal alkoxide to obtain an alkali metal dialkylaluminum alkoxide; and reacting the alkali metal dialkylaluminum alkoxide with a magnesium halide. The alkoxide derivative of the present invention can be vaporized at a low temperature, below 70 DEG C. and, therefore, effectively employed in the CVD process of a magnesium aluminate film.
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Inventors:
Kim, Yoon So
Kho, Wong Yong
Ku, Su Jin
Kho, Wong Yong
Ku, Su Jin
Application Number:
JP52840597A
Publication Date:
January 31, 2000
Filing Date:
February 12, 1997
Export Citation:
Assignee:
Korea Research Institute of Chemical Technology
International Classes:
C07F5/06; C23C16/40; (IPC1-7): C07F19/00; C23C16/40
Other References:
【文献】米国特許5008420(US,A)
Attorney, Agent or Firm:
Takehiko Suzue (5 outside)