Title:
【発明の名称】情報記録再生装置
Document Type and Number:
Japanese Patent JP2595212
Kind Code:
B2
Abstract:
PURPOSE:To attain the high density recording using pits of 1mum theta or below which are not attained by a light beam by using at least one electron beam or over of plural electron beams as an aberration detection means when other electron beam executes recording/reproduction/erasure onto a recording medium. CONSTITUTION:It is possible to scan a tracking electron beam TEB along reference patterns PL, PR with high accuracy as 1/10 of the diameter of a beam spot TEBS, i.e., nearly 0.2mum theta. Thus, even plural electron beams MEB subjected to the reception of an electric field entirely the same as that of the tracking electron beam TEB are scanned with the same accuracy as that for the tracking electron beam TEB and it is possible to trace very accurately a pit PIT recorded on the basis of the reference patterns PL, PR by using the tracking electron beam TEB so as to scan the reference patterns PL, PR at the reproduction or erasure. Since no individual deflection means is required for electron beams in comparison with the light beam having the difficulty in plural beam arrangement with a high density, the high density arrangement of electron beams is easily realized.
Inventors:
Nobutoshi Mizusawa
Yasuhiko Ishiwata
Ryuichi Arai
Yukio Masuda
Miyawaki Mamoru
Hitoshi Oda
Yasuhiko Ishiwata
Ryuichi Arai
Yukio Masuda
Miyawaki Mamoru
Hitoshi Oda
Application Number:
JP19185886A
Publication Date:
April 02, 1997
Filing Date:
August 15, 1986
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L27/14; G11B9/10; H01J31/00; H01L27/10; (IPC1-7): G11B9/10
Domestic Patent References:
| JP60129935A | ||||
| JP60251526A | ||||
| JP6029953A |
Attorney, Agent or Firm:
Hibiya Masahiko