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Title:
OPTICAL TYPE DISPLACEMENT SENSOR
Document Type and Number:
Japanese Patent JPH0712590
Kind Code:
A
Abstract:

PURPOSE: To provide an optical type displacement sensor having a configuration which can cope with an inclination in a surface parallel to a forming surface of a scale.

CONSTITUTION: The optical type displacement sensor comprises a reading head 5 provided at one of two objects to be relatively displaced to optically detect displacement information of a scale 21 of the other side of the two objects, and mounting regulating mechanisms 1, 3a, 3b for rotating the head 5 in a substantially parallel plane to a surface provided with the scale 21.


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Inventors:
HISAMOTO KENJI
KANEDA YASUSHI
ISHIZUKA AKIRA
ISHII SATORU
Application Number:
JP15361893A
Publication Date:
January 17, 1995
Filing Date:
June 24, 1993
Export Citation:
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Assignee:
CANON KK
International Classes:
G01D5/36; (IPC1-7): G01D5/36
Attorney, Agent or Firm:
Marushima Giichi



 
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