Title:
【発明の名称】フォトレジストの現像方法及びその現像装置
Document Type and Number:
Japanese Patent JP3034332
Kind Code:
B2
Inventors:
Matsuoka Yasuo
Application Number:
JP13779891A
Publication Date:
April 17, 2000
Filing Date:
June 10, 1991
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G03F7/20; G03F7/30; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/20; G03F7/30
Domestic Patent References:
| JP4120718A | ||||
| JP1265517A | ||||
| JP63193151A | ||||
| JP62135838A |
Attorney, Agent or Firm:
Kazuo Sato (3 others)