Title:
GREEN SHEET INSPECTING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JPH0526652
Kind Code:
A
Abstract:
PURPOSE:To precisely and efficiently inspect the state of the plugging by the conductor paste formed on a green sheet, the wiring pattern, and the power source/ground pattern. CONSTITUTION:A control processor 17 reads the inspection data consisting of the X-ray output information, the positioning information, and the inspection information such as the search range and threshold value from an FD 18 and stores it in an internal memory. The output of an X-ray tube is controlled by the X-ray output information via an X-ray controller 7, and X, Y tables 14, 15 are controlled by the positioning information via an XY table controller 8. The inspection information is fed to an image processing/recognizing device 6. A green sheet 1 is mounted on the X table 14. A TV camera 5 detects an X-ray image passing through the green sheet 1. The image processing/ recognizing device 6 generates a variable-density shape within the search range from the X-ray image, and its height and width are compared with the threshold values for the judgment of quality.
Inventors:
SUZUKI KUNIO
Application Number:
JP20234891A
Publication Date:
February 02, 1993
Filing Date:
July 17, 1991
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01B15/04; (IPC1-7): G01B15/04
Attorney, Agent or Firm:
Makoto Suzuki
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