Title:
【発明の名称】選択的金属薄膜の形成方法
Document Type and Number:
Japanese Patent JP2553926
Kind Code:
B2
Inventors:
SUGIOKA KOJI
TOYODA KOICHI
TOYODA KOICHI
Application Number:
JP1595989A
Publication Date:
November 13, 1996
Filing Date:
January 25, 1989
Export Citation:
Assignee:
RIKAGAKU KENKYUSHO
International Classes:
C25D5/02; C25D5/54; H01L21/288; H01L21/3205; (IPC1-7): H01L21/288; C25D5/02; C25D5/54; H01L21/3205
Domestic Patent References:
| JP60145612A | ||||
| JP62262468A |
Other References:
レーザー科学研究、Ｎｏ．１０（１９８８）Ｐ．１３０−１３２
Attorney, Agent or Firm:
Minoru Nakamura (7 outside)