Title:
【発明の名称】電気抵抗率の測定方法と4端子プローブ
Document Type and Number:
Japanese Patent JP3033118
Kind Code:
B2
Inventors:
Hideyuki Doi
Application Number:
JP8107790A
Publication Date:
April 17, 2000
Filing Date:
March 30, 1990
Export Citation:
Assignee:
JSR Corporation
International Classes:
G01R1/073; G01R27/02; (IPC1-7): G01R27/02; G01R1/073
Attorney, Agent or Firm:
Yoshikazu Tani