PURPOSE: To prevent heating of a leader electrode by restraining an overcurrent, maintain assembling accuracy by restraining deformation, and secure insulating performance between electrodes by arranging slit holes in a part opposed to a ring getter of the leader electrode.
CONSTITUTION: Slit holes 28 are arranged so as to cover a ring getter position 27 of a conductive plate 11. Thereby, heating of a leader electrode is prevented by restraining an overcurrent generated in the leader electrode due to a leakage magnetic flux of a high frequency coil in the vicinity of the ring getter position 27 of the conductive plate 11, and assembling accuracy is maintained by restraining deformation, and insulating performance between electrodes can be secured.
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OSADA KEIJI
IMAI KANJI
WATANABE TATSUAKI