PURPOSE: To obtain a ceramic thin film having a high reproducibility and reliability with a high efficiency by impregnating a substrate with a coating soln., then pulling out the impregnated substrate and heat-treating the substrate by a convenient and continuous process.
CONSTITUTION: A substrate 3 is dipped in a coating soln. tank 1 filled with a metal alkoxide soln. 2 for a specified time. The substrate 3 is then pulled up from the soln. 2 to a drying zone 5 by the winding roller 9 of a winder on which a ceramic fiber 4 is wound. The substrate is dried at 10-100°C for a specified time, then wound up to a vertical tube furnace 6 by the winder and heat-treated. A film having about 1μm thickness is usually formed by one process, the heat-treated substrate 3 is lowered by the winder, the process is repeated to form a thick film, and a ceramic thin film having a specified thickness is formed.
YANAGAWA TERUAKI
OGAWA KENJI
NAGATA NORIFUMI
IGUCHI MASAHITO
OGIWARA TAKASHI