PURPOSE: To prevent contamination in a clean room, by installing a second operation part outside a clean room in which a semiconductor manufacturing equipment and an operation part are installed, and outputting a switching signal according to a signal from the second operation part when direct operation of the operation part is needed.

CONSTITUTION: An operation part 2A is installed outside a clean room 3 in which a semiconductor manufacturing equipment 1 and an operation part 2 are installed, and connected with communication channels 41, 42 connected between the operation part 2 and a control part 5, via branch communication channels 411, 421. A switch 6A for changing-over communication channels 42, 421 transmitting a signal from each of the operation parts 2, 2A to the control part 5, and a switch 6B for opening and shutting a power supply 7 of the control mart 2 are installed. A connection recognition circuit 8 which opens and shuts the switch 6B by a transmitted signal from the operation part 2A so as to link to it is connected with the operation part 2. Thereby the equipment 1 can be driven by operating the operation part 2A when the control part 5 is out of order, so that contamination in the clean room 3 can be prevented.