Title:
【発明の名称】ガラス基板用カセット
Document Type and Number:
Japanese Patent JP3057684
Kind Code:
B2
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Inventors:
Toshio Yoshida
Kuniharu Saito
Kuniharu Saito
Application Number:
JP11569589A
Publication Date:
July 04, 2000
Filing Date:
May 09, 1989
Export Citation:
Assignee:
Yodogawa Kasei Co., Ltd.
International Classes:
H01L21/673; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JP1272112A | ||||
| JP62128143A | ||||
| JP6071136U |
Attorney, Agent or Firm:
Seiro Oishi