Title:
【発明の名称】回転処理装置及び回転処理方法
Document Type and Number:
Japanese Patent JP2606726
Kind Code:
B2
Inventors:
Kazuo Fushiki
Application Number:
JP19038988A
Publication Date:
May 07, 1997
Filing Date:
July 29, 1988
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F16J15/40; B08B3/02; H01L21/304; (IPC1-7): H01L21/304
Domestic Patent References:
| JP627133A | ||||
| JP6326466A | ||||
| JP62242131A |
Attorney, Agent or Firm:
Suyama Saichi