PURPOSE: To reduce the manufacturing cost while retarding the attenuation of oscillation by composing a resilient body of a sintered alloy having relative density higher than a specified value.
CONSTITUTION: The stator 1 of an actuator comprises a piezoelectric 12 being excited by a drive signal, and a resilient body 11 being excited by the piezoelectric to generate a traveling oscillation wave on the driving surface 11a, wherein a flange 13 is formed on the outer peripheral surface of the resilient body 11. Driving force is transmitted frictionally from the resilient body 11 to a mover 2 and also transmitted from a thick part 21b to a moving target. The resilient body 11 is composed of a metal powder sintered by injection molding to have the relative density of 95% or above and thereby the porosity in the alloy is lowered thus retarding the attenuation of oscillation. Furthermore, a complicated profile such as a pectinated profile can be injection molded by single step thus reducing the manufacturing cost.
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SATANI DAISUKE
SUGANUMA RYOICHI
ICHIKAWA MASANORI