Title:
【発明の名称】流水式洗浄装置
Document Type and Number:
Japanese Patent JP3012210
Kind Code:
B2
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Inventors:
Shigeo Akanuma
Masashi Fujii
Masashi Fujii
Application Number:
JP2584697A
Publication Date:
February 21, 2000
Filing Date:
January 24, 1997
Export Citation:
Assignee:
Speed Fam Clean System Co., Ltd.
International Classes:
B08B3/04; H01L21/304; (IPC1-7): B08B3/04; H01L21/304
Domestic Patent References:
| JP6463086A | ||||
| JP1210091A | ||||
| JP8215648A | ||||
| JP9206708A | ||||
| JP7153736A | ||||
| JP58150486A | ||||
| JP61130389U |
Attorney, Agent or Firm:
Hiroshi Hayashi (1 person outside)