PURPOSE: To simplify the structure of a semiconductor manufacturing device by a method wherein a shifting unit t' table is lifted by turning one screw shaft while a boat mounting arm is lifted by turning the other screw shaft.
CONSTITUTION: Within this semiconductor manufacturing device, a shifting unit lifting motor 39 and a boat lifting motor 40 are manufactured adopting the same standards while a shifting slider 45 and a boat slider 46 made of the same parts are oppositely assembled. In such a constitution, the shifting unit lifting motor 39 is driven to turn screw shaft 41 through the intermediary of a reduction gear 38 and an axial joint also lifting the shifting unit slider 45 and a chucking head 8 through the intermediary of a shifting unit lifting table 49. Furthermore, the boat lifting motor 40 is driven to turn another screw shaft 42 through the intermediary of the reduction gear 38 and the axial joint also lifting the boat slider 46 and a boat cap 11 through the intermediary of a boat mounting arm 50. Through these procedures, the machining and assembling steps can be facilitated.
KAIHATSU HIDEKI
KANO RIICHI
