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Title:
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH0513568
Kind Code:
A
Abstract:

PURPOSE: To prevent lowering of junction breakdown strength of an N-type diffusion layer by making concentration of a field dope layer low at a part wherein the field dope layer of an isolation region is in contact with the N-type diffusion layer.

CONSTITUTION: A P-well 4 and an N-well 6 are formed on a surface of a P-type silicon substrate 2, enclosed with a field oxide film 8 and isolated. In the P-well 4, boron is introduced as P-type impurities below the field oxide film 8 and a field dope layer 10 is formed. In the field dope layer 10, a part 10a which is in contact with the N-well 6 has high concentration and a part 10b which is in contact with a source/drain 12 an N-type diffusion layer has low concentration. In the P-well 4, an NMOS transistor is formed and a PMOS transistor is formed in a region enclosed by the field oxide film 8. Thereby, junction breakdown strength of the N-type diffusion layer can be improved.


Inventors:
HASHIMOTO TAISUKE
FUKUSHIMA YASUSHI
Application Number:
JP18543991A
Publication Date:
January 22, 1993
Filing Date:
June 28, 1991
Export Citation:
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Assignee:
RICOH KK
International Classes:
H01L21/76; H01L21/316; H01L21/8238; H01L27/092; H01L29/78; (IPC1-7): H01L21/316; H01L21/76; H01L27/092; H01L29/784
Attorney, Agent or Firm:
Noguchi Shigeo



 
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