PURPOSE: To cool and heat a sample within a wide temp. region.
CONSTITUTION: The cold head 12 of an extremely low temp. freezer 11, first and second cooling means 13, 14 and a heating means 15 are connected in series and a sample stage 18 is formed on the upper surface of the heating means 15. Further, for example, a spiral groove is formed to the heating means 15 and a heater 45 is arranged to the bottom of the spiral groove. As a result, a spatial heat insulating layer 46 and the first and second cooling means 13, 14 are arranged between the heater 45 and the extremely low temp. freezer 11 and, therefore, the unnecessary heating of the extremely low temp. freezer 11 due to the heating means 15 is suppressed. Further, by allowing a cooling medium whose temp. is lower than that of the first cooling means 13 to flow to the second cooling means 14, a sample can be precooled prior to the cooling of the sample to an extremely low temp. region due to the extremely low temp. freezer 11.
NAKAYAMA KOICHI
MASUDA KAORU
TEKUNORO KOGYO KK