Title:
POSITION DETECTOR
Document Type and Number:
Japanese Patent JP3008653
Kind Code:
B2
Abstract:
PURPOSE: To properly set the positional relation between a projection means and a first object and to detect a relative position between first and second objects by providing the first object plane with reference marks and by entering light fluxes into the reference marks while scanning to utilize a shape of its light quantity distribution.
CONSTITUTION: Reference marks Z5, Z6 are scanned with a light flux 15 in the Z direction. At this time, light fluxes LZ5, LZ6 reflected and diffracted by the reference marks Z5, Z6 enter a vicinity of sensors 11Z5, 11Z6 of a photodetecting means 11 consisting of a plurality of sensors. When the lateral center line of the light flux 15 coincide with reference line B1, the incidence amounts of the light fluxes LZ5, LZ6 from the reference marks Z5, Z6 entering the photodetecting means 11 become equal. Signals from the photodetecting means 11 are processed by a signal processing circuit 3, and a projection means (alignment head 14) is moved so that the light flux 15 may be located at a position equivalent to the intersection P of light quantity distributions 71, 72, resulting in positioning in the Z direction.
Inventors:
Horyung
Kenji Saitoh
Kenji Saitoh
Application Number:
JP7223492A
Publication Date:
February 14, 2000
Filing Date:
February 21, 1992
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F9/00; G01B11/00; H01L21/027; H01L21/30; (IPC1-7): G01B11/00; G03F9/00; H01L21/027
Attorney, Agent or Firm:
Yukio Takanashi