Title:
【発明の名称】X線露光装置
Document Type and Number:
Japanese Patent JP3077422
Kind Code:
B2
Inventors:
Katsuhiko Murakami
Application Number:
JP29545792A
Publication Date:
August 14, 2000
Filing Date:
November 05, 1992
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G21K5/02; H01L21/027; (IPC1-7): H01L21/027; G21K5/02
Domestic Patent References:
| JP582417A |