PURPOSE: To obtain a method and an apparatus for measuring the rotational reflection or outline of an article to be inspected, without requiring any measuring unit or precise support for the article.
CONSTITUTION: Positional fluctuation of one or more than two reference surfaces 9, 11 on an article along first and second tracking axes 17, 19 is measured at a plurality of rotational positions of the article. Positional fluctuation of a target surface 13, for which the rotational deflection and outline are measured, is measured along a third tracking axis 21 included in a plane 23, substantially common with the first and second tracking axes. Positional fluctuation of the rotational axis of the article along the third tracking axis is measured from the positional fluctuation of one or more than two reference surfaces and the separation distance of the tracking axes. Subsequently, the measurement is subtracted from the positional fluctuation of the target surface along the third tracking axis, thus the rotational reflection and the outline are determined.
BURUTSUKU KENTO SAMONDO
HANSU AAMINIO RIYUUMAN
RARII JIYOSEFU APORONIA
