Title:
【発明の名称】X線リソグラフィ用ビームライン
Document Type and Number:
Japanese Patent JP3058603
Kind Code:
B2
Inventors:
Eijiro Toyoda
Application Number:
JP12469997A
Publication Date:
July 04, 2000
Filing Date:
April 30, 1997
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
G21K1/06; G03F7/20; G21K5/02; H01L21/027; (IPC1-7): G21K5/02; G21K1/06; H01L21/027
Domestic Patent References:
| JP4230900A | ||||
| JP4194800A | ||||
| JP4184300A | ||||
| JP4172300A | ||||
| JP4157399A | ||||
| JP4125500A | ||||
| JP8292299A | ||||
| JP961599A | ||||
| JP10282299A |
Attorney, Agent or Firm:
Masanobu Kato