Title:
【発明の名称】アモルファス金属膜及びその製造方法
Document Type and Number:
Japanese Patent JP2564197
Kind Code:
B2
Abstract:
A metal target and a substrate are disposed in confronting relationship in a vacuum chamber whose interior is kept at high vacuum, and laser light is irradiated to the surface of the target to emit a high-speed evaporated material from the target. The high-speed evaporated material is then deposited on the substrate. By applying a predetermined voltage between the target and the substrate, the impact energy of the charged particles in the evaporated material on the substrate are controlled to form an amorphous metal film preferably a pure iron film.
Inventors:
TAKAYANAGI NOBORU
AKIHAMA KAZUHIRO
KIZAKI YOSHIMI
AKIHAMA KAZUHIRO
KIZAKI YOSHIMI
Application Number:
JP1679690A
Publication Date:
December 18, 1996
Filing Date:
January 25, 1990
Export Citation:
Assignee:
TOYOTA JIDOSHA KK
TOYODA CHUO KENKYUSHO KK
TOYODA CHUO KENKYUSHO KK
International Classes:
C23C14/24; C23C14/28; C23C14/14; C23C14/54; C23C30/00; (IPC1-7): C23C14/14; C23C14/28
Domestic Patent References:
| JP6191355A | ||||
| JP6127036A | ||||
| JP6353258A | ||||
| JP63262446A | ||||
| JP6277440A | ||||
| JP5988459U |
Attorney, Agent or Firm:
Kenji Yoshida (2 outside)