Title:
【発明の名称】薄膜形成装置のClF3 によるクリーニングの終点検知法
Document Type and Number:
Japanese Patent JP3056675
Kind Code:
B2
Inventors:
Harumitsu Saito
Akira Fukunaga
Akira Fukunaga
Application Number:
JP26467595A
Publication Date:
June 26, 2000
Filing Date:
September 20, 1995
Export Citation:
Assignee:
Ebara Corporation
International Classes:
C23C16/50; C23C16/44; C23F4/00; H01L21/205; H01L21/302; H01L21/304; H01L21/3065; (IPC1-7): C23F4/00; C23C16/44; H01L21/205; H01L21/3065
Domestic Patent References:
| JP6230525A | ||||
| JP4206822A | ||||
| JP1306582A | ||||
| JP62143A |
Attorney, Agent or Firm:
Katsura Yoshimine (1 person outside)