Title:
【発明の名称】絶縁物層の界面改質方法
Document Type and Number:
Japanese Patent JP2545777
Kind Code:
B2
Inventors:
SAMEJIMA TOSHUKI
USUI SETSUO
USUI SETSUO
Application Number:
JP10293785A
Publication Date:
October 23, 1996
Filing Date:
May 15, 1985
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L21/314; H01L21/263; H01L21/268; (IPC1-7): H01L21/268; H01L21/314
Domestic Patent References:
| JP58114423A |
Attorney, Agent or Firm:
Akira Koike (1 person outside)